- 18561921984
Function description: Enables fine adjustment along the horizontal X-Y axes and the rotary R-axis;
Product features: High rigidity, high precision;
Product range: Travel ranges from ±5 to ±30 mm and ±5 to ±15°.
| CE-IA-XYθ Micro-motion Stage | ||||
| No. | Module | Features | Key Parameters/Configuration | |
| 1 | System Parameters | Stage Dimensions | – | |
| 2 | Travel/Angle | ±5~±30mm | ±5~±15° | |
| 3 | Travel Speed | 5mm/s~20mm/s | 10%/s~30°/s | |
| 4 | Repeatability | ±1um | ±0.005° | |
| 5 | Backlash | ±3um~±8um | 0.025° | |
| 6 | Flatness | 10um~20um | ||
| 7 | Load | 2~30kg | ||
| 8 | Typical Configuration | Lead screw | C0~C5 | |
| 9 | Guideway | Anti-creep cross-roller guideway | ||
| 10 | Sensor | Limit switch/magnetic scale | ||
| 11 | Motor | AC servo/stepper servo/stepper | ||
