Function description: Enables fine adjustment along the horizontal X-Y axes and the rotational R-axis;
Product features: High rigidity, high precision, low-profile;
Product range: Travel ranges from ±5 to ±25 mm and ±3 to ±8° (rotation about the central origin).

| CE-IA-UVWn Micro-motion Stage |
| No. |
Module |
Features |
Key Parameters/Configuration |
| 1 |
System Parameters |
Stage Dimensions |
– |
| 2 |
Travel/Angle |
±5~±25mm |
±3°~±8° |
| 3 |
Travel Speed |
5mm/s~20mm/s |
5%s~20°/s |
| 4 |
Repeatability |
±1um |
±0.005° |
| 5 |
Backlash |
±3um~±8um |
0.025° |
| 6 |
Flatness |
10um~20um |
| 7 |
Load |
5~150kg |
| 8 |
Typical Configuration |
Lead screw |
C0~C5 |
| 9 |
Guideway |
Anti-creep cross-roller guideway |
| 10 |
Sensor |
Limit switch/magnetic scale |
| 11 |
Motor |
AC servo/stepper servo/stepper |